Description

IEC 63068-1 Ed. 1.0 en – Semiconductor devices – Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices – Part 1: Classification of defects

IEC 63068-1:2019(E) gives a classification of defects in as-grown 4H-SiC (Silicon Carbide) epitaxial layers. The defects are classified on the basis of their crystallographic structures and recognized by non-destructive detection methods including bright-field OM (optical microscopy), PL (photoluminescence), and XRT (X-ray topography) images.

Product Details

Edition:

1.0

Published:

01/30/2019

Number of Pages:

23

File Size:

1 file , 5.6 MB

Note:

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